Fast On-Chip Thermometry with TiN Kinetic Inductance Resonators in 22 nm Process Technology

Source: arxiv.org/abs/2608.27057

Johann Drayne, George Ridgard, Lorenzo Peri, Frederic Schlattner, Fabio Olivieri, Mathieu de Kruijf, Isaac Harris, Grayson Noah, James Kirkman, Alberto Gomez-Saiz, M. Fernando Gonzalez-Zalba, Thomas Swift

arXivarxiv/2608.27057Aug 27, 2026quant-phscore 0

Understanding the temporal and spatial dependence of temperature is critical in high-performance cryogenic devices. Typical thermometry techniques struggle to simultaneously combine high bandwidth, sensitivity and on-chip integration, limiting their ability to measure fast intra-device thermal fluctuations. Here, we demonstrate a time-resolved thermometry platform based on TiN kinetic inductance resonators integrated in a 22 nm FDSOI chip. By tracking temperature-dependent shifts in the resonant frequency, we achieve sub-millikelvin temperature sensitivity down to temperatures of 100 mK.…

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